欧美男女啪啪-欧美男女视频-欧美男女性生活视频-欧美男人天堂网-欧美嫩草-欧美你懂得

Automatic Direct Plasma Cleaning System RPD-5
  • Automatic Direct Plasma Cleaning System RPD-5

Automatic Direct Plasma Cleaning System RPD-5

ApplicationsThe system is perfectly used for cleaning and surface activation prior to semiconductor packaging process such as

Applications

The system is perfectly used for cleaning and surface activation prior to semiconductor packaging process such as die bonding, wire bonding, underfill, molding, etc., capable to effectively remove the surface contaminants of organics and oxides from the packaging materials, excellently enhancing the bonding strength and adhesion performance, thus significantly improving the process yield. With automatic substrates or lead frames loading and unloading assembly, the system is featured with fast cleaning cycle and high cleaning uniformity, particularly suitable for highly demanding production where very high performance of cleaning results is mandatory.


Features

Enhanced surface treatment for all products. 

Consistent high-uniformity cleaning for all position of products 

Multiple operation and display for all process steps 

Automatic 4 lanes transferring with loading/unloading (max 6 lanes)

Automatic quick conversion of lane width for product changeover

High throughput productivity (450 strips/h for 5 lanes)

Unique air cooling design in chamber bottom 

Touch screen IPC & PLC based control system 


Specifications

Plasma Frequency

13.56MHz (radio frequency)

Plasma Power

Standard 600W, (optional 1000W)

Generator Cooling

Air cooling at chamber bottom

Product Size

Length: Max. 260mm

Width: 30-60mm(5 lanes); 30-80mm (4 lanes), over 80mm (1-3 lanes)

Thickness: Max.1mm

Lanes

Standard 4 lanes (Max 6 lanes)

Lane Width

30-60mm(5 lanes), 30-80mm (4 lanes), over 80mm (1-3 lanes), automatic quick conversion

SPH

450 strips (for 5 lanes)

Chamber Size (internal)

W280mm x D440mm x H55mm

Mass Flow Controllers

Standard 1 ( up to 2), flow rate 100sccm each

Vacuum Gauge

Pirani or capacitance manometer

Vacuum Pump

Dry pump, built-in type, 1000L/Min@50Hz

Control System

Windows based touchscreen IPC + PLC control, supporting manual and automatic operation, process recipe program editing/storage/execution, and automatic process data recording and display. Supports MES system.

Enclosure Dimension

W1080mm x D1800mm x H1500mm (tower lamp excluded)

Weight

Approx. 700Kg

Power Supply

AC380V, 3P+N+PE, 50Hz, 5kW

Vent Gas

N2, 0.4MPa

Process Gas

Ar, Ar/H2 forming gas, O2, etc., 0.15-0.2MPa

CDA

0.5-0.6MPa


主站蜘蛛池模板: 亚洲精品一区二区三区 | 国产免费福利视频 | 成人福利小视频 | 九九热线精品视频18 | 91啪国| 成人午夜影院在线观看 | 国产97在线观看 | 日本一区二区在线视频 | 日本久久久免费高清 | 国内精品久久久久久久久 | 韩国美女福利专区一区二区 | www.亚洲精品.com | 欧美激情婷婷 | 国产69精品久久久久99 | 国产黄色小视频在线观看 | 日本一区二区三区免费高清在线 | 国产小视频免费 | 亚洲视频免费在线 | 久久99亚洲精品久久久久网站 | 男人天堂免费视频 | 成年人免费在线视频 | 天天干天天爽天天射 | 欧美亚洲视频 | 国产美女精品三级在线观看 | 久久亚洲私人国产精品 | 久久久亚洲欧美综合 | jizzjizz日本护士出水视频 | 一区二区三区视频 | 国产护士资源总站 | 亚洲精品第一页 | 日韩欧美国产亚洲 | 成人做视频免费 | 91se在线观看| 99热播| 天天摸天天操免费播放小视频 | 另类亚洲孕妇分娩网址 | 日韩欧美高清 | 久久久久久久久久福利 | 国产成人精品久久免费动漫 | 亚洲视频在线观看视频 | 日韩久久精品一区二区三区 |